MODELS FOR THE OXIDATION OF SILICON

被引：83

作者：

IRENE, EA

机构：

来源：

CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES | 1988年 / 14卷 / 02期

关键词：

D O I：

10.1080/10408438808242183

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：175 / 223

页数：49

共 177 条

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[3]

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[4]

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[8]

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