SUITABLE PRECURSOR SOLVENT SYSTEMS FOR LASER-INDUCED SURFACE PRENUCLEATION

被引：17

作者：

PREUSS, S

STUKE, M

机构：

[1] Max-Planck-Institut für biophysikalische Chemie, D-3400 Göttingen

来源：

APPLIED SURFACE SCIENCE | 1992年 / 54卷

关键词：

D O I：

10.1016/0169-4332(92)90061-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thin palladium acetate films, generated by spin coating from a solution of palladium acetate in ethyl acetate, were locally prenucleated by KrF excimer laser irradiation. Copper was selectively deposited on the palladium nuclei using electroless plating. Deposition of copper nuclei from copper formate using KrF excimer laser irradiation was investigated. It is shown that these copper nuclei can also be used for the electroless plating process.

引用

页码：308 / 310

页数：3

共 27 条

[21] LASER CHEMICAL VAPOR-DEPOSITION OF COPPER
HOULE, FA
JONES, CR
BAUM, T
PICO, C
KOVAC, CA
[J]. APPLIED PHYSICS LETTERS, 1985, 46 (02) : 204 - 206
[22] LASER-DRIVEN CHEMICAL VAPOR-DEPOSITION OF PLATINUM AT ATMOSPHERIC-PRESSURE AND ROOM-TEMPERATURE FROM CPPT(CH3)3
KOPLITZ, LV
SHUH, DK
CHEN, YJ
WILLIAMS, RS
ZINK, JI
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (18) : 1705 - 1707
[23] Liu Y. S., 1989, Chemtronics, V4, P209
[24] HIGH-SPEED LASER CHEMICAL VAPOR-DEPOSITION OF COPPER - A SEARCH FOR OPTIMUM CONDITIONS
MARKWALDER, B
WIDMER, M
BRAICHOTTE, D
VANDENBERGH, H
[J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (06) : 2470 - 2474
[25] LASER DIRECT WRITING OF COPPER ON VARIOUS THIN-FILM SUBSTRATE MATERIALS
MULLER, HG
BUSCHICK, K
SCHULER, S
PAREDES, A
[J]. APPLIED SURFACE SCIENCE, 1990, 46 (1-4) : 143 - 147
[26] MULLER HG, 1990, APPL PHYS LETT, V56, P904, DOI 10.1063/1.102624
[27] LASER DECOMPOSITION OF PLATINUM METALLOORGANIC FILM FOR ELECTROLESS COPPER PLATING
SAUSA, RC
GUPTA, A
WHITE, JR
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (11) : 2707 - 2713

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