IN-DEPTH DISTRIBUTION ANALYSIS OF NONFLAT SURFACES

被引：4

作者：

DANG, TA

CUDDY, JA

YANG, S

机构：

[1] GTE Products Corporation, Chemical and Metallurgical Division, Towanda, Pennsylvania, 18848, Hawes Street

来源：

SURFACE AND INTERFACE ANALYSIS | 1993年 / 20卷 / 02期

关键词：

D O I：

10.1002/sia.740200206

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Comparison studies of plasma and ion gun sputtering on several types of non-flat surfaces (Au-plated Mo wires, W spheres) have shown a superior uniformity of lateral erosion in plasma sputtering. Conical structures, absent in plasma sputtering, have frequently formed in ion gun sputtering. A superior depth-resolution plasma depth profile consequently results.

引用

页码：121 / 126

页数：6

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