NEW MICROWAVE ION-SOURCE FOR HIGH-ENERGY ION IMPLANTER

被引：14

作者：

AMEMIYA, K ^{[1
]}

TOKIGUCHI, K ^{[1
]}

KOIKE, H ^{[1
]}

SEKI, T ^{[1
]}

SAKUDO, N ^{[1
]}

机构：

[1] HITACHI LTD,NAKA WORKS,KATUTA,IBARAKI 312,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90140-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：87 / 89

页数：3

共 11 条

[1]

BUCKLEYGOLDER IM, 1987, 11TH P S ISIAT 87 TO, P549

[2] USE OF ECR ION SOURCES AT THE AGRIPPA FACILITY [J].

DELAUNAY, M ;

DOUSSON, S ;

GELLER, R ;

JACQUOT, B ;

HITZ, D ;

LUDWIG, P ;

SORTAIS, P ;

BLIMAN, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 23 (1-2) :177-185

[3] REVIEW OF JINR ELECTRON-BEAM ION SOURCES [J].

DONETS, ED .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1976, 23 (02) :897-903

[4]

GELLER R, 1979, IEEE T NUCL SCI, V26, P2120

[5]

MCKENNA C, 1986, NIKKEI MICRODEVICES, V16, P139

[6]

PRAMANIK D, 1984, SOLID STATE TECHNOL, V27, P211

[7] MICROWAVE ION-SOURCE FOR ION-IMPLANTATION [J].

SAKUDO, N .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) :168-177

[8] BEAM EXTRACTION EXPERIMENTS FROM MICROWAVE ION SOURCES [J].

TOKIGUCHI, K ;

SAKUDO, N ;

KOIKE, H .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (08) :1526-1530

[9] NEW MICROWAVE ION-SOURCE FOR MULTIPLY CHARGED ION-BEAM PRODUCTION [J].

TOKIGUCHI, K ;

AMEMIYA, K ;

KOIKE, H ;

SAKUDO, N ;

SEKI, T .

VACUUM, 1988, 38 (06) :487-490

[10]

WORDEMAN MR, 1981, IEEE T ELECTRON DEV, V81, P40

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