CATALYZED CRYSTALLIZATION IN SIO2 THIN-FILMS

被引:3
作者
ALESSAND.EI [1 ]
CAMPBELL, DR [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1149/1.2401988
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1115 / 1118
页数:4
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