AN AES INVESTIGATION OF ALUMINUM, AL OXIDE AND AL NITRIDE THIN-FILMS

被引：51

作者：

MADDEN, HH

GOODMAN, DW

机构：

来源：

SURFACE SCIENCE | 1985年 / 150卷 / 01期

关键词：

D O I：

10.1016/0039-6028(85)90209-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：39 / 46

页数：8

共 17 条

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