ELECTRICAL-PROPERTIES OF SPUTTERED AIN FILMS AND INTERFACE ANALYSES BY AUGER-ELECTRON SPECTROSCOPY

被引：16

作者：

HANTZPERGUE, JJ

PAULEAU, Y

REMY, JC

ROPTIN, D

CAILLER, M

机构：

[1] UNIV NANTES,ECOLE NATL SUPER MECAN,F-44072 NANTES,FRANCE

[2] UNIV NANTES,INST TECHNOL,PHYS MET LAB,F-44072 NANTES,FRANCE

来源：

THIN SOLID FILMS | 1981年 / 75卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90453-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：167 / 176

页数：10

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