MECHANICAL-STRESS AND ELECTRICAL-PROPERTIES OF MNOS DEVICES AS A FUNCTION OF NITRIDE DEPOSITION TEMPERATURE

被引：27

作者：

HEZEL, R ^{[1
]}

HEARN, EW ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL FACIL,DIV DATA SYST,HOPEWELL JUNCTION,NY 12533

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 11期

关键词：

D O I：

10.1149/1.2131309

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1848 / 1854

页数：7

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