PREPARATION AND PROPERTIES OF ALUMINUM NITRIDE FILMS

被引：82

作者：

CHU, TL ^{[1
]}

KELM, RW ^{[1
]}

机构：

[1] SO METHODIST UNIV,INST TECHNOL,DALLAS,TX 75275

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1975年 / 122卷 / 07期

关键词：

D O I：

10.1149/1.2134385

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：995 / 1000

页数：6

相关论文

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