CONTACT RESISTANCE - AL AND AL-SI TO DIFFUSED N+ AND P+ SILICON

[11] RHODES SJ, 1981, SEMICOND INT, V5, P65

[12] STUDY OF CONTACTS OF A DIFFUSED RESISTOR [J]. SOLID-STATE ELECTRONICS, 1971, 14 (06) : 433 - &

[13] DIFFUSION-LIMITED SI PRECIPITATION IN EVAPORATED AL/SI FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) : 2040 - 2050

[11] RHODES SJ, 1981, SEMICOND INT, V5, P65

[12] STUDY OF CONTACTS OF A DIFFUSED RESISTOR [J]. SOLID-STATE ELECTRONICS, 1971, 14 (06) : 433 - &

[13] DIFFUSION-LIMITED SI PRECIPITATION IN EVAPORATED AL/SI FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) : 2040 - 2050