HIGH-RESOLUTION ELECTRON-ENERGY-LOSS SPECTROSCOPY STUDY OF THE UV-LASER PHOTODISSOCIATION OF ADSORBED AL2(CH3)6 ON SI(100)2X1 AND SI(111)7X7 SURFACES

被引：14

作者：

LUBBEN, D

MOTOOKA, T

GREENE, JE

WENDELKEN, JF

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[2] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831

来源：

PHYSICAL REVIEW B | 1989年 / 39卷 / 08期

关键词：

D O I：

10.1103/PhysRevB.39.5245

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：5245 / 5253

页数：9

共 24 条

[1] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV [J].

ASPNES, DE ;

STUDNA, AA .

PHYSICAL REVIEW B, 1983, 27 (02) :985-1009

[2] LASER SURFACE-ADSORBATE INTERACTIONS - THERMAL VERSUS PHOTOELECTRONIC EXCITATION OF MO(CO)6 ON SI(111) [J].

BARTOSCH, CE ;

GLUCK, NS ;

HO, W ;

YING, Z .

PHYSICAL REVIEW LETTERS, 1986, 57 (12) :1425-1428

[3]

BISWAS DR, 1984, J ELECTROCHEM SOC, V130, P234

[4]

BOTKA N, 1983, J APPL PHYS, V54, P1104

[5]

COATES GE, 1971, PRINCIPLES ORGANOMET

[6] PHOTODECOMPOSITION OF MO(CO)6 ADSORBED ON SI(100) [J].

CREIGHTON, JR .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (02) :410-414

[7] TEMPERATURE-DEPENDENT SURFACE-STATES AND TRANSITIONS OF SI(111)-7X7 [J].

DEMUTH, JE ;

PERSSON, BNJ ;

SCHELLSOROKIN, AJ .

PHYSICAL REVIEW LETTERS, 1983, 51 (24) :2214-2217

[8] PHOTODEPOSITION OF METAL-FILMS WITH ULTRAVIOLET-LASER LIGHT [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01) :23-32

[9] UV PHOTOLYSIS OF VANDERWAALS MOLECULAR FILMS [J].

EHRLICH, DJ ;

OSGOOD, RM .

CHEMICAL PHYSICS LETTERS, 1981, 79 (02) :381-388

[10] TIME-RESOLVED SPECTROSCOPIC STUDIES OF THE ULTRAVIOLET-LASER PHOTOLYSIS OF AL ALKYLS FOR FILM GROWTH [J].

ERES, D ;

MOTOOKA, T ;

GORBATKIN, S ;

LUBBEN, D ;

GREENE, JE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (04) :848-852

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