ETCHING OF IN2O3-SN AND IN2O3-TE THIN-FILMS IN DILUTE HCL AND H3PO4

被引：19

作者：

RATCHEVA, T

NANOVA, M

机构：

来源：

THIN SOLID FILMS | 1986年 / 141卷 / 02期

关键词：

D O I：

10.1016/0040-6090(86)90361-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：L87 / L89

页数：3

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