DEPTH RESOLUTION IN SIMS - EXPERIMENTAL INVESTIGATION OF NI AND IN IN CU

被引：13

作者：

MACHT, MP

NAUNDORF, V

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90282-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：189 / 192

页数：4

共 14 条

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CARTER, G ;

COLLINS, R ;

THOMPSON, DA .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1981, 55 (1-2) :99-110

[2] THEORETICAL ASSESSMENTS OF MAJOR PHYSICAL PROCESSES INVOLVED IN THE DEPTH RESOLUTION IN SPUTTER PROFILING [J].

CARTER, G ;

GRASMARTI, A ;

NOBES, MJ .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 62 (3-4) :119-152

[3] MEASUREMENT OF THE DIFFUSION-COEFFICIENT OF COBALT IN COPPER [J].

DOHL, R ;

MACHT, MP ;

NAUNDORF, V .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 86 (02) :603-612

[4]

Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[5] A MODEL FOR ATOMIC MIXING AND PREFERENTIAL SPUTTERING EFFECTS IN SIMS DEPTH PROFILING [J].

KING, BV ;

TSONG, IST .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (04) :1443-1447

[6] TEMPERATURE EFFECTS IN ATOMIC MIXING OF METAL SILICON MULTILAYERS MEASURED BY SIMS [J].

KING, BV ;

TONN, DG ;

TSONG, IST .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :607-615

[7]

LITTMARK U, 1984, THIN FILM DEPTH PROF, P159

[8] DIRECT MEASUREMENT OF SMALL DIFFUSION-COEFFICIENTS WITH SECONDARY ION MASS-SPECTROSCOPY [J].

MACHT, MP ;

NAUNDORF, V .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) :7551-7557

[9]

MACHT MP, 1982, P INT C DIMETA 82 TI

[10]

MACHT MP, 1981, J NUCL MATER, V103, P1487

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