TEMPERATURE EFFECTS IN ATOMIC MIXING OF METAL SILICON MULTILAYERS MEASURED BY SIMS

被引：15

作者：

KING, BV ^{[1
]}

TONN, DG ^{[1
]}

TSONG, IST ^{[1
]}

机构：

[1] ARIZONA STATE UNIV, DEPT PHYS, TEMPE, AZ 85287 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90442-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：607 / 615

页数：9

共 25 条

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