INTRODUCTION TO ION AND PLASMA ETCHING

[1] ABE H, 1975, J JAPAN SOC APPL P S, V44, P287

[2] PREDICTION OF ION-BOMBARDED SURFACE TOPOGRAPHIES USING FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (07) : 1030 - 1040

[3] SECONDARY PROCESSES IN EVOLUTION OF SPUTTER-TOPOGRAPHIES [J]. JOURNAL OF MATERIALS SCIENCE, 1972, 7 (04) : 404 - &

[4] PLASMA ETCHING OF THIN METAL AND DIELECTRIC FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 169 - 169

[5] CONSIDERATIONS ON HIGH-RESOLUTION PATTERNS ENGRAVED BY ION ETCHING [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 483 - 486

[6] CANTAGREL M, 1973, J MATER SCI, V8, P1711, DOI 10.1007/BF02403521

[7] GROWTH OF TOPOGRAPHY DURING SPUTTERING OF AMORPHOUS SOLIDS .4. GENERALIZED THEORY [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (10) : 1473 - 1481

[8] DIMIGEN H, 1975, PHILIPS TECH REV, V35, P199

[9] EVOLUTION OF WELL-DEFINED SURFACE CONTOUR SUBMITTED TO ION-BOMBARDMENT - COMPUTER-SIMULATION AND EXPERIMENTAL INVESTIGATION [J]. JOURNAL OF MATERIALS SCIENCE, 1975, 10 (01) : 52 - 62

[10] DEVELOPMENT OF A GENERAL SURFACE CONTOUR BY ION EROSION - THEORY AND COMPUTER-SIMULATION [J]. JOURNAL OF MATERIALS SCIENCE, 1974, 9 (05) : 725 - 736

[1] ABE H, 1975, J JAPAN SOC APPL P S, V44, P287

[2] PREDICTION OF ION-BOMBARDED SURFACE TOPOGRAPHIES USING FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (07) : 1030 - 1040

[3] SECONDARY PROCESSES IN EVOLUTION OF SPUTTER-TOPOGRAPHIES [J]. JOURNAL OF MATERIALS SCIENCE, 1972, 7 (04) : 404 - &

[4] PLASMA ETCHING OF THIN METAL AND DIELECTRIC FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 169 - 169

[5] CONSIDERATIONS ON HIGH-RESOLUTION PATTERNS ENGRAVED BY ION ETCHING [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 483 - 486

[6] CANTAGREL M, 1973, J MATER SCI, V8, P1711, DOI 10.1007/BF02403521

[7] GROWTH OF TOPOGRAPHY DURING SPUTTERING OF AMORPHOUS SOLIDS .4. GENERALIZED THEORY [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (10) : 1473 - 1481

[8] DIMIGEN H, 1975, PHILIPS TECH REV, V35, P199

[9] EVOLUTION OF WELL-DEFINED SURFACE CONTOUR SUBMITTED TO ION-BOMBARDMENT - COMPUTER-SIMULATION AND EXPERIMENTAL INVESTIGATION [J]. JOURNAL OF MATERIALS SCIENCE, 1975, 10 (01) : 52 - 62

[10] DEVELOPMENT OF A GENERAL SURFACE CONTOUR BY ION EROSION - THEORY AND COMPUTER-SIMULATION [J]. JOURNAL OF MATERIALS SCIENCE, 1974, 9 (05) : 725 - 736