ELECTRON-PARAMAGNETIC RESONANCE OF SILICON IMPLANTED WITH BORON AND ARSENIC IONS

被引:2
作者
GREGORKIEWICZ, T
机构
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1983年 / 77卷 / 3-4期
关键词
D O I
10.1080/00337578308228186
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
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页码:195 / 203
页数:9
相关论文
共 18 条
[1]   ELECTRON-PARAMAGNETIC RESONANCE OF LATTICE DAMAGE IN BORON-IMPLANTED INTRINSIC SILICON [J].
BEEZHOLD, W ;
BROWER, KL .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1973, NS20 (06) :209-213
[2]  
BORDERS JA, 1979, RAD EFF, V6
[3]   ELECTRON PARAMAGNETIC RESONANCE OF DEFECTS IN ION-IMPLANTED SILICON [J].
BROWER, KL ;
VOOK, FL ;
BORDERS, JA .
APPLIED PHYSICS LETTERS, 1969, 15 (07) :208-&
[4]  
BROWER KL, 1977, REV SCI INSTRUM, V48, P2
[5]  
BROWER KL, 1972, J APPL PHYS, V43
[6]   ESR AND OPTICAL ABSORPTION STUDIES OF ION-IMPLANTED SILICON [J].
CROWDER, BL ;
TITLE, RS ;
BRODSKY, MH ;
PETTIT, GD .
APPLIED PHYSICS LETTERS, 1970, 16 (05) :205-&
[7]   ELECTRON PARAMAGNETIC RESONANCE IN ION IMPLANTED SILICON [J].
DALY, DF ;
PICKAR, KA .
APPLIED PHYSICS LETTERS, 1969, 15 (08) :267-&
[8]   ELECTRON-SPIN RESONANCE STUDIES ON ION-IMPLANTED SILICON .1. AMORPHIZATION [J].
HASEGAWA, S ;
ICHIDA, K ;
SHIMIZU, T .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1973, 12 (08) :1181-1189
[9]   SPIN-1 CENTERS IN NEUTRON-IRRADIATED SILICON [J].
JUNG, W ;
NEWELL, GS .
PHYSICAL REVIEW, 1963, 132 (02) :648-&
[10]  
Lee Y. H., 1972, RADIAT EFF, V15, P77