RESIDUAL LATTICE DISORDER IN SELF-IMPLANTED SILICON AFTER PULSED LASER IRRADIATION

被引：17

作者：

SERVIDORI, M

ZANI, A

GARULLI, G

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 70卷 / 02期

关键词：

D O I：

10.1002/pssa.2210700239

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：691 / 701

页数：11

共 31 条

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