THE LATTICE LOCATIONS OF SILICON IMPURITIES IN GAAS - EFFECTS DUE TO STOICHIOMETRY, THE FERMI ENERGY, THE SOLUBILITY LIMIT AND DX BEHAVIOR

被引:72
作者
NEWMAN, RC
机构
[1] Blackett Lab., Imperial Coll. of Sci., Technol. and Med., London
关键词
D O I
10.1088/0268-1242/9/10/001
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An outline of infrared localized vibrational mode absorption spectroscopy relevant to silicon impurities in GaAs is presented. Absorption lines from Si(Ga) donors, Si(As) acceptors, Si(Ga)-Si(As) pairs, Si(Ga)-V(Ga) (Ga vacancy) pairs and a complex Si-X (involving Si(As) and V(Ga)) have been identified as well as lines from Si(Ga)-Cu(Ga), Si(Ga)-H, Si(As)-H and Si(Ga)-B(As) pairs. These observations are related to the electrical properties of n-type Bridgman, liquid-encapsulated Czochralski and molecular beam epitaxial (MBE) (001) GaAs, and to p-type liquid phase epitaxial and MBE (111)A layers. The discussion relates to dynamic site switching, effects due to counter-doping with shallow acceptors, the solubility of silicon, and DX behaviour observed in homogeneously doped material and proposed for delta-doped MBE (001) layers. The major problem is to understand the processes that limit the maximum carrier concentration that can be achieved in n-type crystals.
引用
收藏
页码:1749 / 1762
页数:14
相关论文
共 94 条
[21]  
EAVES L, 1989, I PHYS C SER, V95, P315
[22]  
EAVES L, 1988, I PHYS C SER, V91, P355
[23]   SILICON INCORPORATION IN LEC GROWTH OF SINGLE-CRYSTAL GALLIUM-ARSENIDE [J].
ELLIOT, AG ;
FLAT, A ;
VANDERWATER, DA .
JOURNAL OF CRYSTAL GROWTH, 1992, 121 (03) :349-359
[24]   REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION STUDY OF THE GAASSIGAAS SYSTEM [J].
FAHY, MR ;
ASHWIN, MJ ;
HARRIS, JJ ;
NEWMAN, RC ;
JOYCE, BA .
APPLIED PHYSICS LETTERS, 1992, 61 (15) :1805-1807
[25]   INCORPORATION OF SILICON DURING MBE GROWTH OF GAAS ON (111)A SUBSTRATES [J].
FAHY, MR ;
NEAVE, JH ;
ASHWIN, MJ ;
MURRAY, R ;
NEWMAN, RC ;
JOYCE, BA ;
KADOYA, Y ;
SAKAKI, H .
JOURNAL OF CRYSTAL GROWTH, 1993, 127 (1-4) :871-876
[26]   EFFECTS OF CONFIGURATION INTERACTION ON INTENSITIES AND PHASE SHIFTS [J].
FANO, U .
PHYSICAL REVIEW, 1961, 124 (06) :1866-&
[27]   Isotopic fine structure of the local mode absorption from [Si-Ga-Ge-As] pairs in gallium arsenide [J].
Gledhill, GA ;
Newman, RC ;
Sellors, J .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1986, 1 (05) :298-301
[28]  
GUTKIN AA, 1993, FIZ TEKH POLUPROV, V27, P1526
[29]  
GUTKIN AA, 1993, FIZ TEKH POLUPROV, V27, P1516
[30]  
HART L, 1994, MATER SCI FORUM, V143-, P647, DOI 10.4028/www.scientific.net/MSF.143-147.647