EFFECT OF THE TYPE OF SUBSTRATES ON THE DUCTILITY AND MICROSTRUCTURE OF ELECTROLESS COPPER-DEPOSITS

被引:19
作者
NAKAHARA, S
MAK, CY
OKINAKA, Y
机构
[1] AT&T Bell Laboratories, Murray Hill, New Jersey
关键词
D O I
10.1149/1.2221082
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The ductility of fine-grained (0.1 approximately 0.5 mum) electroless copper deposits was found to vary with the type of substrates that they were plated on; under identical plating conditions, the ductility of the electroless copper grown on activated plastic substrates was higher than that grown epitaxially on a large-grained copper foil. This ductility difference is shown to originate from a difference in the void structure developed at the grain boundaries of the deposits during film formation.
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页码:533 / 538
页数:6
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