THERMODYNAMIC ANALYSIS OF MOLECULAR-BEAM EPITAXY OF III-V COMPOUNDS - APPLICATION TO THE GAYIN1-YAS MULTILAYER EPITAXY

被引：18

作者：

SHEN, JY

CHATILLON, C

机构：

[1] Laboratoire de Thermodynamique et Physico-Chimie Métallurgiques, Associé au CNRS, URA 29, ENSEEG., Domaine Universitaire, BP 75

来源：

JOURNAL OF CRYSTAL GROWTH | 1990年 / 106卷 / 04期

关键词：

D O I：

10.1016/0022-0248(90)90029-K

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The basis of the thermodynamic analysis of molecular beam epitaxy (MBE) for III-V compounds is established. Condensation and evaporation phenomena that compete for the crystal growth are presented referred to equilibrium conditions. Sticking coefficients, growth rates, composition impinging flows or source temperatures are calculated for the MBE of Ga(y)In1-yAs epilayers from thermodynamically assessed data for the As-Ga, As-In, Ga-In and As-Ga-In systems.

引用

页码：553 / 565

页数：13

共 34 条

[1]

ANSARA I, IN PRESS B PHASE DIA

[2]

ARHUR JR, 1975, J VACUUM SIC TECHNOL, V121, P200

[3]

BRUMBACHSB, 1972, SURF SCI, V29, P555

[4] THE GROWTH OF CRYSTALS AND THE EQUILIBRIUM STRUCTURE OF THEIR SURFACES [J].

BURTON, WK ;

CABRERA, N ;

FRANK, FC .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1951, 243 (866) :299-358

[5] MOLECULAR-BEAM EPITAXY BEAM FLUX MODELING [J].

CURLESS, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (02) :531-534

[6]

ERIKSSON G, 1973, CHEM SCRIPTA, V4, P193

[7]

EYRING H, 1964, CONDENSATION EVAPORA, P3

[8] INCORPORATION RATES OF GALLIUM AND ALUMINUM ON GAAS DURING MOLECULAR-BEAM EPITAXY AT HIGH SUBSTRATE TEMPERATURES [J].

FISCHER, R ;

KLEM, J ;

DRUMMOND, TJ ;

THORNE, RE ;

KOPP, W ;

MORKOC, H ;

CHO, AY .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2508-2510

[9] INTERACTION KINETICS OF AS2 AND GA ON [100] GAAS SURFACES [J].

FOXON, CT ;

JOYCE, BA .

SURFACE SCIENCE, 1977, 64 (01) :293-304

[10] INTERACTION KINETICS OF AS4 AND GA ON [100] GAAS SURFACES USING A MODULATED MOLECULAR-BEAM TECHNIQUE [J].

FOXON, CT ;

JOYCE, BA .

SURFACE SCIENCE, 1975, 50 (02) :434-450

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