INCORPORATION RATES OF GALLIUM AND ALUMINUM ON GAAS DURING MOLECULAR-BEAM EPITAXY AT HIGH SUBSTRATE TEMPERATURES

被引:86
作者
FISCHER, R [1 ]
KLEM, J [1 ]
DRUMMOND, TJ [1 ]
THORNE, RE [1 ]
KOPP, W [1 ]
MORKOC, H [1 ]
CHO, AY [1 ]
机构
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
关键词
D O I
10.1063/1.332317
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2508 / 2510
页数:3
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