MASS-SPECTROMETRIC ANALYSIS OF VAPORS IN OXIDATION OF SI3N4 COMPACTS

被引：17

作者：

LIN, SS ^{[1
]}

机构：

[1] USA,MAT & MECH RES CTR,WATERTOWN,MA 02072

来源：

关键词：

Compendex;

D O I：

10.1111/j.1151-2916.1975.tb19596.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

SILICON COMPOUNDS

引用

页码：160 / 160

页数：1

共 7 条

[1] Davidge R. W., 1972, SPECIAL CERAMICS, P329
[2] OXIDATION KINETICS OF POWDERED SILICON NITRIDE
HORTON, RM
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1969, 52 (03) : 121 - +
[3] Kainasskii I.S., 1960, OGNEUPORY, V25, P175
[4] LIN SB, TO BE PUBLISHED
[5] LIN SS, 1973, AMMRCTR739 TECH REPT
[6] PASSIVITY DURING THE OXIDATION OF SILICON AT ELEVATED TEMPERATURES
WAGNER, C
[J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (09) : 1295 - 1297
[7] WASHBURN ME, 1967, AM CERAM SOC BULL, V46, P667