LARGE INCREASE OF REFRACTIVE-INDEX AND COMPACTNESS IN SILOXANE-TYPE SPIN-ON-GLASS INDUCED BY ION-IMPLANTATION

被引：16

作者：

MORIYA, N

SHACHAMDIAMAND, Y

KALISH, R

机构：

[1] TECHNION ISRAEL INST TECHNOL,DEPT PHYS,IL-32000 HAIFA,ISRAEL

[2] TECHNION ISRAEL INST TECHNOL,KIDRON MICROELECTR RES CTR,IL-32000 HAIFA,ISRAEL

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 02期

关键词：

D O I：

10.1063/1.103958

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P+ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×1016 cm -2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊1015 cm-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.

引用

页码：108 / 110

页数：3

共 12 条

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