CHARACTERIZATION OF A SPIN-APPLIED DIELECTRIC FOR USE IN MULTILEVEL METALLIZATION

被引：7

作者：

RILEY, PE ^{[1
]}

SHELLEY, A ^{[1
]}

机构：

[1] FAIRCHILD RES CTR,PALO ALTO,CA 94304

来源：

关键词：

D O I：

10.1149/1.2095926

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

DIELECTRIC MATERIALS

引用

页码：1207 / 1210

页数：4

共 25 条

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