SIMULTANEOUS OBSERVATIONS OF PARTIALLY OXIDIZED SURFACES BY AES AND SIMS FOR AL, SI, TI, V, AND CR

被引：16

作者：

KOMIYA, S ^{[1
]}

NARUSAWA, T ^{[1
]}

SATAKE, T ^{[1
]}

机构：

[1] ULVAC CORP, HAGISONO 2500, CHIGASAKI 253, JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568791

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：361 / 365

页数：5

共 23 条

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