THE EFFECTS OF INCORPORATING WATER INTO VACUUM-DEPOSITED AMORPHOUS-SILICON FILMS

被引:10
作者
AUDAS, R
BRODIE, DE
COWAN, JA
MOORE, CJL
机构
关键词
D O I
10.1139/p86-003
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:16 / 21
页数:6
相关论文
共 9 条
[1]   EFFECTS OF ELECTRON-BEAM IRRADIATION AND SUBSTRATE-TEMPERATURE ON THE PHYSICAL-PROPERTIES OF EVAPORATED A-SI-C THIN-FILMS [J].
AUDAS, RD ;
MOORE, CJL ;
STURTEVANT, TEW ;
JOHNSON, GW ;
LESLIE, JD ;
BRODIE, DE .
CANADIAN JOURNAL OF PHYSICS, 1985, 63 (06) :838-841
[2]   SOME PROPERTIES OF A-SI-C FILMS PREPARED BY VACUUM DEPOSITION WITH SIMULTANEOUS SUBSTRATE BOMBARDMENT BY ELECTRONS [J].
BRODIE, DE ;
MOORE, CJL .
CANADIAN JOURNAL OF PHYSICS, 1984, 62 (09) :898-903
[3]   THE ORIGIN OF SPECIMEN CONTAMINATION IN THE ELECTRON MICROSCOPE [J].
ENNOS, AE .
BRITISH JOURNAL OF APPLIED PHYSICS, 1953, 4 (APR) :101-106
[4]  
FANE RW, 1981, J PHYS D, V14
[5]  
LEWIS B, 1978, NUCLEATION GROWTH TH
[6]   CHEMICAL BONDING OF HYDROGEN AND OXYGEN IN GLOW-DISCHARGE - DEPOSITED THIN-FILMS OF A-GE-H AND A-GE-(H,O) [J].
LUCOVSKY, G ;
CHAO, SS ;
YANG, J ;
TYLER, JE ;
ROSS, RC ;
CZUBATYJ, W .
PHYSICAL REVIEW B, 1985, 31 (04) :2190-2197
[7]  
SAKAI H, 1984, 17TH P IEEE PHOT SPE, P76
[8]   ELECTRICAL CONDUCTION IN AMORPHOUS SILICON AND GERMANIUM [J].
WALLEY, PA .
THIN SOLID FILMS, 1968, 2 (04) :327-&
[9]  
YAMAGUCHI M, 1984, J APPL PHYS, V56, P2303, DOI 10.1063/1.334264