EFFECTS OF ELECTRON-BEAM IRRADIATION AND SUBSTRATE-TEMPERATURE ON THE PHYSICAL-PROPERTIES OF EVAPORATED A-SI-C THIN-FILMS

被引：3

作者：

AUDAS, RD

MOORE, CJL

STURTEVANT, TEW

JOHNSON, GW

LESLIE, JD

BRODIE, DE

机构：

来源：

CANADIAN JOURNAL OF PHYSICS | 1985年 / 63卷 / 06期

关键词：

D O I：

10.1139/p85-135

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：838 / 841

页数：4

共 15 条

[1] PHYSICAL CHARACTERIZATION OF HALOGENATED AND HYDROGENATED AMORPHOUS-SILICON FILMS [J].

AUGELLI, V ;

MURRI, R ;

GALASSINI, S ;

TEPORE, A .

THIN SOLID FILMS, 1980, 69 (03) :315-320

[2] SOME PROPERTIES OF A-SI-C FILMS PREPARED BY VACUUM DEPOSITION WITH SIMULTANEOUS SUBSTRATE BOMBARDMENT BY ELECTRONS [J].

BRODIE, DE ;

MOORE, CJL .

CANADIAN JOURNAL OF PHYSICS, 1984, 62 (09) :898-903

[3] AMORPHOUS SILICON SOLAR-CELL [J].

CARLSON, DE ;

WRONSKI, CR .

APPLIED PHYSICS LETTERS, 1976, 28 (11) :671-673

[4] DISORDER AND THE OPTICAL-ABSORPTION EDGE OF HYDROGENATED AMORPHOUS-SILICON [J].

CODY, GD ;

TIEDJE, T ;

ABELES, B ;

BROOKS, B ;

GOLDSTEIN, Y .

PHYSICAL REVIEW LETTERS, 1981, 47 (20) :1480-1483

[5] THE PRODUCTION OF AMORPHOUS-SILICON WITHOUT HYDROGEN [J].

FANE, RW .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (07) :L113-L116

[6]

FUJIMOTO K, 1984, SOL CELLS, V11, P359

[7] SOLAR-ENERGY-RESEARCH-INSTITUTE WORKSHOP ON LIGHT-INDUCED CHANGE IN A-SI-H AND ITS EFFECT ON SOLAR-CELL STABILITY, SAN-DIEGO, CA, USA, SEPTEMBER 24-25, 1982 [J].

HAMAKAWA, Y ;

MCMAHON, T .

SOLAR CELLS, 1983, 9 (1-2) :1-2

[8]

LEWIS B, 1978, NUCLEATION GROWTH TH, P8

[9]

MATSUMURA H, 1981, JPN J APPL PHYS, V20, P275, DOI 10.7567/JJAPS.20S1.275

[10] PURE A-ZNTE AND A-ZNSE - REPRODUCIBILITY AND DEPOSITION CONTROL [J].

MOORE, CJL ;

BRODIE, DE .

CANADIAN JOURNAL OF PHYSICS, 1982, 60 (03) :340-344

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