THE PRODUCTION OF AMORPHOUS-SILICON WITHOUT HYDROGEN

被引：10

作者：

FANE, RW

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1981年 / 14卷 / 07期

关键词：

D O I：

10.1088/0022-3727/14/7/004

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L113 / L116

页数：4

共 9 条

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[2]

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