SOME PROPERTIES OF A-SI-C FILMS PREPARED BY VACUUM DEPOSITION WITH SIMULTANEOUS SUBSTRATE BOMBARDMENT BY ELECTRONS

被引：7

作者：

BRODIE, DE

MOORE, CJL

机构：

来源：

CANADIAN JOURNAL OF PHYSICS | 1984年 / 62卷 / 09期

关键词：

D O I：

10.1139/p84-123

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：898 / 903

页数：6

共 13 条

[1] OPTICAL-CONSTANTS OF SILICON FILMS DEPOSITED BY THE R.F. GLOW-DISCHARGE OF SICL4 [J].

AUGELLI, V ;

MURRI, R ;

SCHIAVULLI, L ;

BRUNO, G ;

CAPEZZUTO, P ;

CRAMAROSSA, F ;

EVANGELISTI, F ;

FORTUNATO, G .

THIN SOLID FILMS, 1981, 86 (04) :359-367

[2] PLASMA PREPARATIONS OF AMORPHOUS SILICON FILMS [J].

BRODSKY, MH .

THIN SOLID FILMS, 1978, 50 (MAY) :57-67

[3] THE PRODUCTION OF AMORPHOUS-SILICON WITHOUT HYDROGEN [J].

FANE, RW .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (07) :L113-L116

[4] HIGHLY DOPED SPUTTERED AMORPHOUS-SILICON WITHOUT HYDROGEN [J].

FANE, RW ;

ZAKA, Y .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 57 (01) :1-7

[5]

FRITZSCHE H, 1978, SOLID STATE TECHNOL, V21, P55

[6]

GRIGOROVICI R, 1969, INT C AMORPHOUS LIQ

[7]

HAMAKAWA Y, 1983, SOLAR CELLS, V9

[8]

MATSUMURA H, 1981, JPN J APPL PHYS, V20, P275, DOI 10.7567/JJAPS.20S1.275

[9] MICROPOROSITY INDUCED BY NUCLEATION AND GROWTH PROCESSES IN CRYSTALLINE AND NON-CRYSTALLINE FILMS [J].

NAKAHARA, S .

THIN SOLID FILMS, 1977, 45 (03) :421-432

[10] NEW DEVELOPMENT IN STUDY OF AMORPHOUS SILICON HYDROGEN ALLOYS - STORY OF O [J].

PAESLER, MA ;

ANDERSON, DA ;

FREEMAN, EC ;

MODDEL, G ;

PAUL, W .

PHYSICAL REVIEW LETTERS, 1978, 41 (21) :1492-1495

← 1 2 →