HIGHLY DOPED SPUTTERED AMORPHOUS-SILICON WITHOUT HYDROGEN

被引:11
作者
FANE, RW
ZAKA, Y
机构
关键词
D O I
10.1016/0022-3093(83)90403-9
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:1 / 7
页数:7
相关论文
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