MICROPOROSITY INDUCED BY NUCLEATION AND GROWTH PROCESSES IN CRYSTALLINE AND NON-CRYSTALLINE FILMS

被引：69

作者：

NAKAHARA, S ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1016/0040-6090(77)90229-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：421 / 432

页数：12

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[9]

NAKAHARA S, TO BE PUBLISHED

[10]

NAKAHARA S, UNPUBLISHED WORK