COMPOSITION OF SELECTIVELY GROWN INXGA1-XAS STRUCTURES FROM LOCALLY RESOLVED RAMAN-SPECTROSCOPY

被引:52
作者
FINDERS, J [1 ]
GEURTS, J [1 ]
KOHL, A [1 ]
WEYERS, M [1 ]
OPITZ, B [1 ]
KAYSER, O [1 ]
BALK, P [1 ]
机构
[1] RHEIN WESTFAL TH AACHEN,INST SEMICOND ELECTR,W-5100 AACHEN,GERMANY
关键词
D O I
10.1016/0022-0248(91)90448-E
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The composition of In(x)Ga(1-x)As stripes of different width, selectively grown by low pressure MOVPE or MOMBE, was determined from the eigenfrequency of the Ga-As lattice vibration using Raman spectroscopy. In contrast to MOMBE, structures grown by MOVPE show a strong enhancement of the In content with decreasing width and increasing distances between the stripes. Comparative studies on MOVPE grown In(x)Ga(1-x)P structures indicate a behavior similar to that observed in the case of In(x)Ga(1-x)As.
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页码:151 / 155
页数:5
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