SOLVENTLESS POLYIMIDE FILMS BY VAPOR-DEPOSITION

被引：209

作者：

SALEM, JR ^{[1
]}

SEQUEDA, FO ^{[1
]}

DURAN, J ^{[1
]}

LEE, WY ^{[1
]}

YANG, RM ^{[1
]}

机构：

[1] IBM CORP,DIV GEN TECHNOL,E FISHKILL,NY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573930

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：369 / 374

页数：6

共 16 条

[1] ADROVA N, 1970, POLYMIDES NEW GLASS
[2] BUCHWALTER PL, 1984, POLYIMIDES SYNTHESIS, V1, P537
[3] COTTS PM, 1984, POLYIMIDES SYNTHESIS, V1, P223
[4] Gupta M., UNPUB
[5] HIROAKA H, 1984, J ELECTROCHEM SOC, V131, P2938
[6] Leary H. J. Jr., 1979, Surface and Interface Analysis, V1, P75, DOI 10.1002/sia.740010302
[7] LEARY HJ, 1982, P S CHARACTERIZATION
[8] PROPERTIES OF THIN POLYIMIDE FILMS
ROTHMAN, LB
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (10) : 2216 - 2220
[9] INPLANE ORIENTATION OF POLYIMIDE
RUSSELL, TP
GUGGER, H
SWALEN, JD
[J]. JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 1983, 21 (09) : 1745 - 1756
[10] AROMATIC POLYPYROMELLITIMIDES FROM AROMATIC POLYAMIC ACIDS
SROOG, CE
ENDREY, AL
ABRAMO, SV
BERR, CE
EDWARDS, WM
OLIVIER, KL
[J]. JOURNAL OF POLYMER SCIENCE PART A-GENERAL PAPERS, 1965, 3 (4PA): : 1373 - &