DEVELOPMENT OF A NEW MICROWAVE PLASMA TORCH AND ITS APPLICATION TO DIAMOND SYNTHESIS

被引：61

作者：

MITSUDA, Y

YOSHIDA, T

AKASHI, K

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 02期

关键词：

D O I：

10.1063/1.1140416

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：249 / 252

页数：4

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