INTERACTIONS IN METALLIZATION SYSTEMS FOR INTEGRATED-CIRCUITS

[111] Wehrmann R., 1967, HIGH TEMPERATURE MAT, P399

[112] TIN AND TAN AS DIFFUSION-BARRIERS IN METALLIZATIONS TO SILICON SEMICONDUCTOR-DEVICES [J]. APPLIED PHYSICS LETTERS, 1980, 36 (06) : 456 - 458

[113] 1979, HDB CHEM PHYSICS

[114] 1973, SEMICONDUCTOR SILICO

[115] 1969, SEMICONDUCTOR SILICO

[116] 1977, SEMICONDUCTOR SILICO

[111] Wehrmann R., 1967, HIGH TEMPERATURE MAT, P399

[112] TIN AND TAN AS DIFFUSION-BARRIERS IN METALLIZATIONS TO SILICON SEMICONDUCTOR-DEVICES [J]. APPLIED PHYSICS LETTERS, 1980, 36 (06) : 456 - 458

[113] 1979, HDB CHEM PHYSICS

[114] 1973, SEMICONDUCTOR SILICO

[115] 1969, SEMICONDUCTOR SILICO

[116] 1977, SEMICONDUCTOR SILICO