INTERACTIONS IN METALLIZATION SYSTEMS FOR INTEGRATED-CIRCUITS

[71] HIGH-TEMPERATURE STABILITY OF PTSI FORMED BY REACTION OF METAL WITH SILICON OR BY COSPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 6943 - 6951

[72] RESISTIVITIES OF THIN-FILM TRANSITION-METAL SILICIDES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (02) : 293 - 301

[73] REFRACTORY SILICIDES FOR INTEGRATED-CIRCUITS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (04): : 775 - 792

[74] MURARKA SP, 1983, SILICIDES VLSI APPLI

[75] MURARKA SP, 1979, IEDM, P454

[76] REDUCTION OF POLY-SI DISSOLUTION AND CONTACT RESISTANCE AT AL-N-POLY-SI INTERFACES IN INTEGRATED-CIRCUITS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (01) : 169 - 171

[77] DIFFUSION BARRIERS IN THIN-FILMS [J]. THIN SOLID FILMS, 1978, 52 (03) : 415 - 443

[78] Nicolet MA, 1983, VLSI ELECTRONICS MIC, V6, P330

[79] GENERAL-ASPECTS OF BARRIER LAYERS FOR VERY-LARGE-SCALE INTEGRATION APPLICATIONS .2. PRACTICE [J]. THIN SOLID FILMS, 1982, 96 (04) : 317 - 326

[80] STUDIES OF TI-W-AU METALLIZATION ON ALUMINUM [J]. THIN SOLID FILMS, 1978, 53 (02) : 195 - 205

[71] HIGH-TEMPERATURE STABILITY OF PTSI FORMED BY REACTION OF METAL WITH SILICON OR BY COSPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 6943 - 6951

[72] RESISTIVITIES OF THIN-FILM TRANSITION-METAL SILICIDES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (02) : 293 - 301

[73] REFRACTORY SILICIDES FOR INTEGRATED-CIRCUITS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (04): : 775 - 792

[74] MURARKA SP, 1983, SILICIDES VLSI APPLI

[75] MURARKA SP, 1979, IEDM, P454

[76] REDUCTION OF POLY-SI DISSOLUTION AND CONTACT RESISTANCE AT AL-N-POLY-SI INTERFACES IN INTEGRATED-CIRCUITS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (01) : 169 - 171

[77] DIFFUSION BARRIERS IN THIN-FILMS [J]. THIN SOLID FILMS, 1978, 52 (03) : 415 - 443

[78] Nicolet MA, 1983, VLSI ELECTRONICS MIC, V6, P330

[79] GENERAL-ASPECTS OF BARRIER LAYERS FOR VERY-LARGE-SCALE INTEGRATION APPLICATIONS .2. PRACTICE [J]. THIN SOLID FILMS, 1982, 96 (04) : 317 - 326

[80] STUDIES OF TI-W-AU METALLIZATION ON ALUMINUM [J]. THIN SOLID FILMS, 1978, 53 (02) : 195 - 205