VERY SMOOTH ALGAAS-GAAS QUANTUM-WELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:9
作者
DUPUIS, RD [1 ]
NEFF, JG [1 ]
PINZONE, CJ [1 ]
机构
[1] UNIV TEXAS,DEPT ELECT & COMP ENGN,AUSTIN,TX 78712
基金
美国国家科学基金会;
关键词
D O I
10.1016/0022-0248(92)90517-M
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report here the low-pressure metalorganic chemical vapor deposition growth of AlGaAs-GaAs quantum well heterostructures having low-temperature (4.2 K) photoluminescence spectra with full width at half-maximum (FWHM) values ranging from approximately 6 to 4 meV for quantum wells having 6-28 monolayer (ML) widths, respectively. These linewidths are compared to those measured for quantum wells grown by molecular beam epitaxy, flow-rate modulation epitaxy, and atomic layer epitaxy. We find that the FWHM values for the thinnest quantum wells grown in the present study (approximately 6 ML) are equal to or narrower than those observed for comparable structures produced by other technologies.
引用
收藏
页码:558 / 564
页数:7
相关论文
共 17 条
[1]   ROOM-TEMPERATURE LASER OPERATION OF QUANTUM-WELL GA(1-X)ALXAS-GAAS LASER-DIODES GROWN BY ORGANOMETALLUIC CHEMICAL VAPOR-DEPOSITION [J].
DUPUIS, RD ;
DAPKUS, PD ;
HOLONYAK, N ;
REZEK, EA ;
CHIN, R .
APPLIED PHYSICS LETTERS, 1978, 32 (05) :295-297
[2]   PHOTOLUMINESCENCE FROM ALGAAS-GAAS SINGLE QUENTUM WELLS WITH GROWTH INTERRUPTED HETEROINTERFACES GROWN BY MOLECULAR-BEAM EPITAXY [J].
FUKUNAGA, T ;
KOBAYASHI, KLI ;
NAKASHIMA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (07) :L510-L512
[3]   ATOMIC LAYER EPITAXY OF ALXGA1-XAS AND DEVICE QUALITY GAAS [J].
GONG, JR ;
COLTER, PC ;
JUNG, D ;
HUSSIEN, SA ;
PARKER, CA ;
DIP, A ;
HYUGA, F ;
DUNCAN, WM ;
BEDAIR, SM .
JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) :83-88
[4]   PHOTOLUMINESCENCE OF ALGAAS GAAS QUANTUM WELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
KAWAI, H ;
KANEKO, K ;
WATANABE, N .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (02) :463-467
[5]  
KAWAI H, 1984, J APPL PHYS, V56, P467
[6]   FLOW-RATE MODULATION EPITAXY OF GAAS AND ALGAAS [J].
KOBAYASHI, N ;
MAKIMOTO, T ;
YAMAUCHI, Y ;
HORIKOSHI, Y .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (02) :640-651
[7]   PHOTOLUMINESCENCE OF GAAS QUANTUM-WELLS GROWN BY MOLECULAR-BEAM EPITAXY WITH GROWTH INTERRUPTIONS [J].
KOPF, RF ;
SCHUBERT, EF ;
HARRIS, TD ;
BECKER, RS .
APPLIED PHYSICS LETTERS, 1991, 58 (06) :631-633
[8]   REDUCTION OF TRAP CONCENTRATION AND INTERFACE ROUGHNESS OF GAAS/ALGAAS QUANTUM WELLS BY LOW GROWTH-RATES IN MOLECULAR-BEAM EPITAXY [J].
MAIERHOFER, C ;
MUNNIX, S ;
BIMBERG, D ;
BAUER, RK ;
MARS, DE ;
MILLER, JN .
APPLIED PHYSICS LETTERS, 1989, 55 (01) :50-52
[9]   EXTRINSIC PHOTO-LUMINESCENCE FROM GAAS QUANTUM WELLS [J].
MILLER, RC ;
GOSSARD, AC ;
TSANG, WT ;
MUNTEANU, O .
PHYSICAL REVIEW B, 1982, 25 (06) :3871-3877
[10]   PHOTOLUMINESCENCE STUDIES OF THE EFFECTS OF INTERRUPTION DURING THE GROWTH OF SINGLE GAAS/AI0.37GA0.63AS QUANTUM-WELLS [J].
MILLER, RC ;
TU, CW ;
SPUTZ, SK ;
KOPF, RF .
APPLIED PHYSICS LETTERS, 1986, 49 (19) :1245-1247