BUOYANT CONVECTION DURING CZOCHRALSKI SILICON GROWTH WITH A STRONG, NONUNIFORM, AXISYMMETRICAL MAGNETIC-FIELD

被引:10
作者
KHINE, YY [1 ]
WALKER, JS [1 ]
机构
[1] UNIV ILLINOIS,DEPT MECH & IND ENGN,URBANA,IL 61801
基金
美国国家科学基金会;
关键词
D O I
10.1016/0022-0248(94)00732-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
This paper treats the buoyant convection during the Czochralski growth of silicon crystals with a steady, strong, non-uniform, axisymmetric magnetic field. We consider a family of magnetic fields which includes a uniform axial magnetic field and a ''cusp'' field which is produced by identical solenoids placed symmetrically above and below the plane of the crystal-melt interface and free surface. We investigate the evolution of the buoyant convection as the magnetic field is changed continuously from a uniform axial field to a cusp field, with a constant value of the root-mean-squared magnetic flux density in the melt. We also investigate changes as the magnetic flux density is increased. While the cusp field appears very promising, perfect alignment between the local magnetic field vector and the crystal-melt interface or free surface is not possible, so the effects of a slight misalignment are also investigated.
引用
收藏
页码:313 / 319
页数:7
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