SURFACE-ANALYSIS BY RBS AND NRA

被引:5
作者
BRAUN, M
机构
[1] Research Inst of Physics, Stockholm, Swed, Research Inst of Physics, Stockholm, Swed
关键词
D O I
10.1016/0042-207X(84)90222-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
15
引用
收藏
页码:1045 / 1052
页数:8
相关论文
共 15 条
  • [1] ALSTETTER CJ, 1978, NUCL INSTRUM METHODS, V149, P59
  • [2] Andersen H. H., 1977, HYDROGEN STOPPING PO
  • [3] DEPTH PROFILING BY ION-BEAM SPECTROMETRY
    BORGESEN, P
    BEHRISCH, R
    SCHERZER, BMU
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 27 (04): : 183 - 195
  • [4] DETERMINATION OF NONHOMOGENEOUS HIGH-CONCENTRATION DEPTH DISTRIBUTIONS USING ELASTIC BACKSCATTERING DATA
    BRAUN, M
    BREWER, R
    STUESSI, H
    VEPREK, S
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 28 (01): : 25 - 33
  • [5] THEORETICAL ANALYSIS OF ENERGY-SPECTRA OF BACKSCATTERED IONS
    BRICE, DK
    [J]. THIN SOLID FILMS, 1973, 19 (01) : 121 - 135
  • [6] Chu WK., 1978, BACKSCATTERING SPECT
  • [7] ANALYSIS AND DEPTH PROFILING OF DEUTERIUM WITH THE DCHE-3,P)HE-4 REACTION BY DETECTING THE PROTONS AT BACKWARD ANGLES
    DIEUMEGARD, D
    DUBREUIL, D
    AMSEL, G
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1979, 166 (03): : 431 - 445
  • [8] ECKSTEIN W, 1976, ION BEAM SURFACE LAY, V2, P821
  • [9] ELASTIC BACKSCATTERING AS A TOOL TO DETERMINE THE COMPOSITION OF SPECIFIC THIN-FILMS
    FRIED, T
    BRAUN, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 198 (2-3): : 523 - 526
  • [10] DENSITY PROFILE OF IMPLANTED HE-3 MEASURED BY MEANS OF HE-3(D,P)HE-4 NUCLEAR-REACTION
    HUFSCHMIDT, M
    HEINTZE, V
    MOLLER, W
    KAMKE, D
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1975, 124 (02): : 573 - 577