LATERAL VARIATION MEASUREMENT OF HELIUM CONCENTRATION IN IMPLANTED AL FOILS USING A PROTON MICROBEAM

被引:6
作者
BODART, F [1 ]
DONNELLY, SE [1 ]
机构
[1] FAC UNIV NOTRE DAME PAIX,DEPT PHYS,B-5000 NAMUR,BELGIUM
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期
关键词
D O I
10.1016/0167-5087(83)91035-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:529 / 532
页数:4
相关论文
共 9 条
[1]   HELIUM RE-EMISSION AND SURFACE DEFORMATION IN 316 STAINLESS-STEEL DURING 170DEGREESC TO 700DEGREESC IMPLANTATIONS [J].
BAUER, W ;
THOMAS, GJ .
JOURNAL OF NUCLEAR MATERIALS, 1973, 47 (02) :241-245
[2]  
Das S. K., 1976, ADV CHEM, V158, p112
[3]   OBSERVATION OF OVER-PRESSURIZED BUBBLES IN HELIUM-IRRADIATED ALUMINUM FILMS [J].
DEBRAS, G ;
GILLES, JM ;
LUCAS, AA .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1979, 51 (02) :559-565
[4]   HELIUM ION-BOMBARDMENT OF THIN ALUMINUM FILMS [J].
DONNELLY, SE ;
BODART, F ;
BARFOOT, KM ;
WERZ, R ;
WEBB, RP .
THIN SOLID FILMS, 1982, 94 (04) :289-305
[6]   INTER-BUBBLE FRACTURE MECHANISM OF BLISTER FORMATION ON HELIUM-IRRADIATED METALS [J].
EVANS, JH .
JOURNAL OF NUCLEAR MATERIALS, 1977, 68 (02) :129-140
[7]   PROTON AND NUCLEAR MICRO-PROBE DEVELOPMENTS [J].
LEGGE, GJF .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 197 (01) :243-253
[8]   THE ROLE OF GAS-PRESSURE AND LATERAL STRESS ON BLISTERING [J].
WOLFER, WG .
JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) :713-720
[9]  
Ziegler J. F, 1977, STOPPING RANGES IONS, V4