P-CHANNEL GERMANIUM MOSFETS WITH HIGH CHANNEL MOBILITY

被引:42
作者
MARTIN, SC
HITT, LM
ROSENBERG, JJ
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D O I
10.1109/55.29667
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:325 / 326
页数:2
相关论文
共 6 条
[1]   GROWTH AND MATERIALS CHARACTERIZATION OF NATIVE GERMANIUM OXYNITRIDE THIN-FILMS ON GERMANIUM [J].
HYMES, DJ ;
ROSENBERG, JJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (04) :961-965
[2]  
MARSHALL ED, 1985, MATER RES SOC S P, V47, P161
[4]   SELF-ALIGNED GERMANIUM MOSFETS USING A NITRIDED NATIVE OXIDE GATE INSULATOR [J].
ROSENBERG, JJ ;
MARTIN, SC .
IEEE ELECTRON DEVICE LETTERS, 1988, 9 (12) :639-640
[5]  
WEAST RC, 1985, HDB CHEM PHYSICS
[6]   PREPARTION OF GERMANIUM NITRIDE FILMS BY LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION [J].
YOUNG, AB ;
ROSENBERG, JJ ;
SZENDRO, I .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (11) :2867-2870