COMPARISON OF THE RETENTION CHARACTERISTICS OF LOW-ENERGY XENON AND CESIUM IMPLANTED IN SILICON

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 257 - 278

[2] ALMEN O, 1961, NUCL INSTRUM METHODS, V11, P259

[3] Andersen CA., 1970, INT J MASS SPECTROM, V3, P413, DOI [10.1016/0020-7381(70)80001-8, DOI 10.1016/0020-7381(70)80001-8]

[4] DOSE DEPENDENCE OF 45 keV V + AND Bi + ION SPUTTERING YIELD OF COPPER. [J]. Radiation Effects, 1973, 19 (04): : 257 - 261

[5] CESIUM ION SPUTTERING OF ALUMINUM [J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (09) : 3344 - +

[6] ENERGY AND FLUENCE DEPENDENCE OF THE SPUTTERING YIELD OF SILICON BOMBARDED WITH ARGON AND XENON [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (03) : 1519 - 1528

[7] ION SORPTION IN PRESENCE OF SPUTTERING [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (508): : 299 - &

[8] SURFACE CESIUM CONCENTRATIONS IN CESIUM-ION-BOMBARDED ELEMENTAL AND COMPOUND TARGETS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 324 - 327

[9] CHRISTODOULIDES CE, 1978, NUCL INSTR METH, V149, P225

[10] DENNIS JR, 1975, I PHYS C SER, V23, P467

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 257 - 278

[2] ALMEN O, 1961, NUCL INSTRUM METHODS, V11, P259

[3] Andersen CA., 1970, INT J MASS SPECTROM, V3, P413, DOI [10.1016/0020-7381(70)80001-8, DOI 10.1016/0020-7381(70)80001-8]

[4] DOSE DEPENDENCE OF 45 keV V + AND Bi + ION SPUTTERING YIELD OF COPPER. [J]. Radiation Effects, 1973, 19 (04): : 257 - 261

[5] CESIUM ION SPUTTERING OF ALUMINUM [J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (09) : 3344 - +

[6] ENERGY AND FLUENCE DEPENDENCE OF THE SPUTTERING YIELD OF SILICON BOMBARDED WITH ARGON AND XENON [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (03) : 1519 - 1528

[7] ION SORPTION IN PRESENCE OF SPUTTERING [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (508): : 299 - &

[8] SURFACE CESIUM CONCENTRATIONS IN CESIUM-ION-BOMBARDED ELEMENTAL AND COMPOUND TARGETS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 324 - 327

[9] CHRISTODOULIDES CE, 1978, NUCL INSTR METH, V149, P225

[10] DENNIS JR, 1975, I PHYS C SER, V23, P467