SURFACE CESIUM CONCENTRATIONS IN CESIUM-ION-BOMBARDED ELEMENTAL AND COMPOUND TARGETS

被引:49
作者
CHELGREN, JE
KATZ, W
DELINE, VR
EVANS, CA
BLATTNER, RJ
WILLIAMS, P
机构
[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,SCH CHEM SCI,URBANA,IL 61801
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词
CESIUM AND ALLOYS;
D O I
10.1116/1.569939
中图分类号
O59 [应用物理学];
学科分类号
摘要
Auger electron spectrometry has been used to characterize the atomic cesium concentration left bracket Cs right bracket //a at the surface of cesium ion bombarded silicon and various metal silicides. The Si** minus ion yield was found to be proportional to left bracket Cs right bracket //v**2**. **8**+36**0**. **1. Surface cesium concentration was also found to increase with increasing inverse sputtering yield S** minus **1 of the substrate. Deviations from a linear dependence of left bracket Cs right bracket //v on S** minus **1 are ascribed to differential sputtering effects.
引用
收藏
页码:324 / 327
页数:4
相关论文
共 17 条
  • [1] Andersen CA., 1970, INT J MASS SPECTROM, V3, P413, DOI [10.1016/0020-7381(70)80001-8, DOI 10.1016/0020-7381(70)80001-8]
  • [2] BERNHEIM M, 1977, J PHYS LETT-PARIS, V38, pL325, DOI 10.1051/jphyslet:019770038015032500
  • [3] CHANG CC, 1974, CHARACTERIZATION SOL
  • [4] UNIFIED EXPLANATION FOR SECONDARY ION YIELDS
    DELINE, VR
    EVANS, CA
    WILLIAMS, P
    [J]. APPLIED PHYSICS LETTERS, 1978, 33 (07) : 578 - 580
  • [5] DELINE VR, 1978, APPL PHYS LETT, V33, P830
  • [6] RELATIVE SENSITIVITY FACTORS FOR QUANTITATIVE AUGER ANALYSIS OF BINARY-ALLOYS
    HALL, PM
    MORABITO, JM
    CONLEY, DK
    [J]. SURFACE SCIENCE, 1977, 62 (01) : 1 - 20
  • [7] LIAU ZL, 1978, J APPL PHYS, V49, P5292
  • [8] SECONDARY-ION MASS-SPECTROMETRY AND ITS USE IN DEPTH PROFILING
    LIEBL, H
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 385 - 391
  • [9] THIN-FILMS AND SOLID-PHASE REACTIONS
    MAYER, JW
    POATE, JM
    TU, KN
    [J]. SCIENCE, 1975, 190 (4211) : 228 - 234
  • [10] MAYER JW, 1974, ION BEAM SURFACE LAY