共 17 条
- [11] PALMBERG PW, 1972, HDB AUGER ELECTRON S
- [12] SCHIOTT HE, 1971, P INT C ION IMPLANTA
- [13] AUGER-SPUTTER PROFILING STUDY OF PHOSPHORUS PILEUP AT SI-SIO2 INTERFACE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (04): : 1519 - 1519
- [14] SLODZIAN G, 1966, CR ACAD SCI B PHYS, V263, P1246