CHANGES IN THE OPTICAL REFLECTIVITY OF IMPLANTED SILICON AS A FUNCTION OF IMPLANTATION ENERGY

被引：12

作者：

AHARONI, H ^{[1
]}

SWART, PL ^{[1
]}

机构：

[1] RAND AFRIKAANS UNIV,DEPT ELECT & ELECTR ENGN,JOHANNESBURG,SOUTH AFRICA

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 09期

关键词：

D O I：

10.1063/1.94925

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：892 / 894

页数：3

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