SOME FUNDAMENTAL-ASPECTS OF GLOW-DISCHARGES IN PLASMA-ASSISTED PROCESSES

被引：35

作者：

FANCEY, KS

MATTHEWS, A

机构：

来源：

SURFACE & COATINGS TECHNOLOGY | 1987年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0257-8972(87)90173-3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：17 / 29

页数：13

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共 25 条

[1] SIMPLE PARALLEL PLATE ENERGY ANALYZER FOR MEASURING THE ENERGY-DISTRIBUTION OF METAL VAPORS IN A DISCHARGE
AHMED, NAG
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1980, 13 (12): : 1305 - 1308
[2] THE CHARACTERISTICS OF THE ION AND NEUTRAL FLUXES INCIDENT ON THE SUBSTRATE IN AN ION PLATING DISCHARGE
ARMOUR, DG
VALISADEH, H
SOLIMAN, FAH
CARTER, G
[J]. VACUUM, 1984, 34 (1-2) : 295 - 300
[3] Chapman B., 1980, GLOW DISCHARGE PROCE
[4] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE
COBURN, JW
KAY, E
[J]. APPLIED PHYSICS LETTERS, 1971, 18 (10) : 435 - &
[5] A SYSTEM FOR DETERMINING MASS ENERGY OF PARTICLES INCIDENT ON A SUBSTRATE IN A PLANAR DIODE SPUTTERING SYSTEM
COBURN, JW
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1970, 41 (08) : 1219 - &
[6] COBURN JW, 1971, SOLID STATE TECH DEC, P49
[7] GLOW-DISCHARGE ION GUN FOR ETCHING
CROCKETT, CG
[J]. VACUUM, 1973, 23 (01) : 11 - 13
[8] ION ENERGIES AT CATHODE OF A GLOW DISCHARGE
DAVIS, WD
VANDERSLICE, TA
[J]. PHYSICAL REVIEW, 1963, 131 (01): : 219 - &
[9] MODELING OF GLOW-DISCHARGE SPUTTERING SYSTEMS - THEORY OF THE CATHODE FALL REGION
GRASMARTI, A
ABRIL, I
VALLESABARCA, JA
[J]. THIN SOLID FILMS, 1985, 124 (01) : 59 - 65
[10] MEASUREMENT OF SYMMETRIC CHARGE-EXCHANGE CROSS-SECTION IN HELIUM AND ARGON IN IMPACT ENERGY-RANGE 1-10 KEV
HEGERBERG, R
STEFANSSON, T
ELFORD, MT
[J]. JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1978, 11 (01) : 133 - 147