OPTICAL AND DIELECTRIC-PROPERTIES OF THIN SIOX FILMS OF VARIABLE COMPOSITION

被引：44

作者：

SHABALOV, AL

FELDMAN, MS

机构：

来源：

THIN SOLID FILMS | 1983年 / 110卷 / 03期

关键词：

D O I：

10.1016/0040-6090(83)90239-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：215 / 224

页数：10

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