HYDROGEN IN SEMI-INSULATING POLYCRYSTALLINE SILICON FILMS

被引：44

作者：

KNOLLE, WR ^{[1
]}

MAXWELL, HR ^{[1
]}

BENENSON, RE ^{[1
]}

机构：

[1] SUNY ALBANY,DEPT PHYS,ALBANY,NY 12222

来源：

关键词：

D O I：

10.1063/1.328302

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4385 / 4390

页数：6

共 34 条

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[3] HYDROGEN RATIOS AND PROFILES IN DEPOSITED AMORPHOUS AND POLYCRYSTALLINE FILMS AND IN METALS USING NUCLEAR TECHNIQUES
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[7] SIMS ANALYSIS OF DEUTERIUM DIFFUSION IN HYDROGENATED AMORPHOUS SILICON
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[8] FRITZSCHE H, 1978, SOLID STATE TECHNOL, V21, P55
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