THE PHASE-COMPOSITION OF SIOX FILMS

[1] ELECTRON SPIN RESONANCE IN AMORPHOUS SILICON, GERMANIUM, AND SILICON CARBIDE [J]. PHYSICAL REVIEW LETTERS, 1969, 23 (11) : 581 - &

[2] CRISOM DL, 1974, SOLID STATE COMMUN, V15, P479

[3] GINOVKER AS, 1980, 7TH T ALL UN C EL PR, P270

[4] CRYSTALLOGRAPHIC STUDY OF SEMI-INSULATING POLYCRYSTALLINE SILICON (SIPOS) DOPED WITH OXYGEN-ATOMS [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) : 3987 - 3992

[5] HARSTEIN A, 1980, APPL PHYS LETT, V36, P836

[6] ELECTRON-SPIN RESONANCE AND HOPPING CONDUCTIVITY OF A-SIOX [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1979, 32 (1-3) : 327 - 338

[7] VARIATION OF SEMICONDUCTOR PROPERTIES THROUGH THE SIOX REGION OF SI - SIO2 INTERFACES [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 1011 - 1014

[8] VERGI UP, 1979, 11TH P C EL MICR MOS, V1, P101

[1] ELECTRON SPIN RESONANCE IN AMORPHOUS SILICON, GERMANIUM, AND SILICON CARBIDE [J]. PHYSICAL REVIEW LETTERS, 1969, 23 (11) : 581 - &

[2] CRISOM DL, 1974, SOLID STATE COMMUN, V15, P479

[3] GINOVKER AS, 1980, 7TH T ALL UN C EL PR, P270

[4] CRYSTALLOGRAPHIC STUDY OF SEMI-INSULATING POLYCRYSTALLINE SILICON (SIPOS) DOPED WITH OXYGEN-ATOMS [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) : 3987 - 3992

[5] HARSTEIN A, 1980, APPL PHYS LETT, V36, P836

[6] ELECTRON-SPIN RESONANCE AND HOPPING CONDUCTIVITY OF A-SIOX [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1979, 32 (1-3) : 327 - 338

[7] VARIATION OF SEMICONDUCTOR PROPERTIES THROUGH THE SIOX REGION OF SI - SIO2 INTERFACES [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 1011 - 1014

[8] VERGI UP, 1979, 11TH P C EL MICR MOS, V1, P101