A NEW CONCEPT FOR IMPROVED ION AND ELECTRON LENSES - ABERRATION CORRECTED SYSTEMS OF PLANAR ELECTROSTATIC DEFLECTION ELEMENTS

被引:7
作者
DALGLISH, RL
WINCHESTER, T
SMITH, AM
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期
关键词
D O I
10.1016/0167-5087(83)90945-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:7 / 10
页数:4
相关论文
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